By minimizing its weight, the aluminum stage allows you to have a lightweight machine; and by using a cross roller guide, it allows you to achieve high accuracy; also, various types can be combined to create a customized form. Various options are available depending on the slide and drive method,

It can be fine-tuned depending on the type of the drive and can be used just like a table without the left/right accessories (micrometer head & lock device). Some drawbacks are that it is weak to vibration, and excessive force when installing the user’s jig on the top or bottom plate may damage the bearing.

Specification / Model	S3H-4016L, R, C	S3H-4018L, R, C	S3H-6018L, R, C	S3H-6020L, R, C
Microhead Position	Left, Right, Center	Left, Right, Center	Left, Right, Center	Left, Right, Center
Stage Surface (mm)	40 X 40	40 X 40	60 X 60	60 X 60
Stroke (mm) - XY	± 6.5	± 6.5	± 6.5	± 6.5
Stroke (mm) - Z	± 3	± 3	± 6.5	± 6.5
Resolution (mm)	10um / division (0.01)	10um / division (0.01)	10um / division (0.01)	10um / division (0.01)
Parallelism (mm)	0.05	0.05	0.05	0.05
Running Parallelism (mm)	0.02	0.02	0.02	0.02
Straightness (mm)	0.005	0.005	0.01	0.01
Travel Guide	Crossed Roller Bearing	Crossed Roller Bearing	Crossed Roller Bearing	Crossed Roller Bearing
Material	Aluminum	Aluminum	Aluminum	Aluminum
Load Capacity (kg/f)	1	1	4	4
Weight (kg)	0.42	0.42	0.95	1

Specification / Model	S3H-6024L, R, C	S3H-80L, R, C	S3H-100L, R, C	S3H-12025L, R, C
Microhead Position	Left, Right, Center	Left, Right, Center	Left, Right, Center	Left, Right, Center
Stage Surface (mm)	60 X 60	80 X 80	100 X 100	120 X 120
Stroke (mm) - XY	± 6.5	± 12.5	± 12.5	± 12.5
Stroke (mm) - Z	± 6.5	± 6.5	± 12.5	± 12.5
Resolution (mm)	10um / division (0.01)	10um / division (0.01)	10um / division (0.01)	10um / division (0.01)
Parallelism (mm)	0.05	0.05	0.08	0.08
Running Parallelism (mm)	0.02	0.02	0.02	0.02
Straightness (mm)	0.01	0.01	0.01	0.01
Travel Guide	Crossed Roller Bearing	Crossed Roller Bearing	Crossed Roller Bearing	Crossed Roller Bearing
Material	Aluminum	Aluminum	Aluminum	Aluminum
Load Capacity (kg/f)	4	5	5	6
Weight (kg)	1.1	1.72	2.24	4.35

Specification / Model	S3H-12050L, R, C
Microhead Position	Left, Right, Center
Stage Surface (mm)	120 X 120
Stroke (mm) - XY	± 25
Stroke (mm) - Z	± 12.5
Resolution (mm)	10um / division (0.01)
Parallelism (mm)	0.08
Running Parallelism (mm)	0.02
Straightness (mm)	0.01
Travel Guide	Crossed Roller Bearing
Material	Aluminum
Load Capacity (kg/f)	6
Weight (kg)	4.35

Cross Roller S3H XYZ-Stages

Available Options