By minimizing its weight, the aluminum stage allows you to have a lightweight machine; and by using a cross roller guide, it allows you to achieve high accuracy; also, various types can be combined to create a customized form. Various options are available depending on the slide and drive method,

It can be fine-tuned depending on the type of the drive and can be used just like a table without the left/right accessories (micrometer head & lock device). Some drawbacks are that it is weak to vibration, and excessive force when installing the user’s jig on the top or bottom plate may damage the bearing.

Specification / Model	S5H-40L, R	S5H-60L, R	S5H-80L, R
Micro head Position	Left, Right	Left, Right	Left, Right
Stage Surface (mm)	40 X 40	60 x 60	80 x 80
Stroke (mm) - XY	± 6.5	± 6.5	± 12.5
Stroke (mm) - Z	± 3	± 6.5	± 6.5
Resolution (mm)	10um / division (0.01)	10um / division (0.01)	10um / division (0.01)
Parallelism (mm)	0.05	0.05	0.05
Running Parallelism (mm)	0.02	0.02	0.02
Straightness (mm)	0.005	0.01	0.01
Travel Guide	V-Groove & Crossed Roller Bearing	V-Groove & Crossed Roller Bearing	V-Groove & Crossed Roller Bearing
Material	Aluminum	Aluminum	Aluminum
Load Capacity (kg/f)	1	3.5	4
Weight (kg)	0.37	0.84	1.6

Cross Roller S5H-Compact XYZ-Stages

Available Options