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Cross Roller S3H XYZ-Stages
By minimizing its weight, the aluminum stage allows you to have a lightweight machine; and by using a cross roller guide, it allows you to achieve high accuracy; also, various types can be combined to create a customized form. Various options are available depending on the slide and drive method,
It can be fine-tuned depending on the type of the drive and can be used just like a table without the left/right accessories (micrometer head & lock device). Some drawbacks are that it is weak to vibration, and excessive force when installing the user’s jig on the top or bottom plate may damage the bearing.
| Specification / Model | S3H-4016L, R, C | S3H-4018L, R, C | S3H-6018L, R, C | S3H-6020L, R, C |
|---|---|---|---|---|
| Microhead Position | Left, Right, Center | Left, Right, Center | Left, Right, Center | Left, Right, Center |
| Stage Surface (mm) | 40 X 40 | 40 X 40 | 60 X 60 | 60 X 60 |
| Stroke (mm) - XY | ± 6.5 | ± 6.5 | ± 6.5 | ± 6.5 |
| Stroke (mm) - Z | ± 3 | ± 3 | ± 6.5 | ± 6.5 |
| Resolution (mm) | 10um / division (0.01) | 10um / division (0.01) | 10um / division (0.01) | 10um / division (0.01) |
| Parallelism (mm) | 0.05 | 0.05 | 0.05 | 0.05 |
| Running Parallelism (mm) | 0.02 | 0.02 | 0.02 | 0.02 |
| Straightness (mm) | 0.005 | 0.005 | 0.01 | 0.01 |
| Travel Guide | Crossed Roller Bearing | Crossed Roller Bearing | Crossed Roller Bearing | Crossed Roller Bearing |
| Material | Aluminum | Aluminum | Aluminum | Aluminum |
| Load Capacity (kg/f) | 1 | 1 | 4 | 4 |
| Weight (kg) | 0.42 | 0.42 | 0.95 | 1 |
| Specification / Model | S3H-6024L, R, C | S3H-80L, R, C | S3H-100L, R, C | S3H-12025L, R, C |
|---|---|---|---|---|
| Microhead Position | Left, Right, Center | Left, Right, Center | Left, Right, Center | Left, Right, Center |
| Stage Surface (mm) | 60 X 60 | 80 X 80 | 100 X 100 | 120 X 120 |
| Stroke (mm) - XY | ± 6.5 | ± 12.5 | ± 12.5 | ± 12.5 |
| Stroke (mm) - Z | ± 6.5 | ± 6.5 | ± 12.5 | ± 12.5 |
| Resolution (mm) | 10um / division (0.01) | 10um / division (0.01) | 10um / division (0.01) | 10um / division (0.01) |
| Parallelism (mm) | 0.05 | 0.05 | 0.08 | 0.08 |
| Running Parallelism (mm) | 0.02 | 0.02 | 0.02 | 0.02 |
| Straightness (mm) | 0.01 | 0.01 | 0.01 | 0.01 |
| Travel Guide | Crossed Roller Bearing | Crossed Roller Bearing | Crossed Roller Bearing | Crossed Roller Bearing |
| Material | Aluminum | Aluminum | Aluminum | Aluminum |
| Load Capacity (kg/f) | 4 | 5 | 5 | 6 |
| Weight (kg) | 1.1 | 1.72 | 2.24 | 4.35 |
| Specification / Model | S3H-12050L, R, C |
|---|---|
| Microhead Position | Left, Right, Center |
| Stage Surface (mm) | 120 X 120 |
| Stroke (mm) - XY | ± 25 |
| Stroke (mm) - Z | ± 12.5 |
| Resolution (mm) | 10um / division (0.01) |
| Parallelism (mm) | 0.08 |
| Running Parallelism (mm) | 0.02 |
| Straightness (mm) | 0.01 |
| Travel Guide | Crossed Roller Bearing |
| Material | Aluminum |
| Load Capacity (kg/f) | 6 |
| Weight (kg) | 4.35 |
