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Cross Roller S6H Z-Stages
By minimizing its weight, the aluminum stage allows you to have a lightweight machine; and by using a cross roller guide, it allows you to achieve high accuracy; also, various types can be combined to create a customized form. Various options are available depending on the slide and drive method,
It can be fine-tuned depending on the type of the drive and can be used just like a table without the left/right accessories (micrometer head & lock device). Some drawbacks are that it is weak to vibration, and excessive force when installing the user’s jig on the top or bottom plate may damage the bearing.
| Specification / Model | S6H-40 | S6H-60 | S6H-80 | S6H-100 |
|---|---|---|---|---|
| Micro head Position | Center | Center | Center | Center |
| Z - Stage Type | Horizontal | Horizontal | Horizontal | Horizontal |
| Stage Surface (mm) | 40 X 40 | 60 X 60 | 80 X 80 | 100 X 100 |
| Stroke (mm) | ± 3 | ± 6.5 | ± 6.5 | ± 12.5 |
| Resolution (mm) | 10um / division (0.01) | 10um / division (0.01) | 10um / division (0.01) | 10um / division (0.01) |
| Parallelism (mm) | 0.05 | 0.05 | 0.05 | 0.08 |
| Running Parallelism (mm) | 0.02 | 0.02 | 0.02 | 0.02 |
| Straightness (mm) | 0.005 | 0.01 | 0.01 | 0.01 |
| Travel Guide | Crossed Roller Bearing | Crossed Roller Bearing | Crossed Roller Bearing | Crossed Roller Bearing |
| Material | Aluminum | Aluminum | Aluminum | Aluminum |
| Load Capacity (kg/f) | 1 | 3 | 4 | 5 |
| Weight (kg) | 0.145 | 0.45 | 0.8 | 1.1 |
| Specification / Model | S6H-120 |
|---|---|
| Micro head Position | Center |
| Z - Stage Type | Horizontal |
| Stage Surface (mm) | 120 X 120 |
| Stroke (mm) | ± 12.5 |
| Resolution (mm) | 10um / division (0.01) |
| Parallelism (mm) | 0.08 |
| Running Parallelism (mm) | 0.02 |
| Straightness (mm) | 0.01 |
| Travel Guide | Crossed Roller Bearing |
| Material | Aluminum |
| Load Capacity (kg/f) | 6 |
| Weight (kg) | 1.35 |
