By minimizing its weight, the aluminum stage allows you to have a lightweight machine; and by using a cross roller guide, it allows you to achieve high accuracy; also, various types can be combined to create a customized form. Various options are available depending on the slide and drive method,
It can be fine-tuned depending on the type of the drive and can be used just like a table without the left/right accessories (micrometer head & lock device). Some drawbacks are that it is weak to vibration, and excessive force when installing the user’s jig on the top or bottom plate may damage the bearing.
| Specification / Model |
S6V-25L, R, C |
S6V-4016L, R, C |
S6V-4018L, R, C |
S6V-6018L, R, C |
| Micro head Position |
Left, Right, Center |
Left, Right, Center |
Left, Right, Center |
Left, Right, Center |
| Z - Stage Type |
Vertical |
Vertical |
Vertical |
Vertical |
| Stage Surface (mm) |
25 X 25 |
40 X 40 |
40 X 40 |
60 X 60 |
| Stroke (mm) |
± 3 |
± 6.5 |
± 6.5 |
± 6.5 |
| Resolution (mm) |
10um / division (0.01) |
10um / division (0.01) |
10um / division (0.01) |
10um / division (0.01) |
| Parallelism (mm) |
0.03 |
0.03 |
0.03 |
0.03 |
| Running Parallelism (mm) |
0.02 |
0.02 |
0.02 |
0.02 |
| Straightness (mm) |
0.003 |
0.003 |
0.003 |
0.008 |
| Travel Guide |
Crossed Roller Bearing |
Crossed Roller Bearing |
Crossed Roller Bearing |
Crossed Roller Bearing |
| Material |
Aluminum |
Aluminum |
Aluminum |
Aluminum |
| Load Capacity (kg/f) |
0.5 |
2 |
2 |
2 |
| Weight (kg) |
0.047 |
0.137 |
0.137 |
0.28 |
| Specification / Model |
S6V-6020L, R, C |
S6V-6024L, R, C |
S6V-80L, R, C |
S6V-100L, R, C |
| Micro head Position |
Left, Right, Center |
Left, Right, Center |
Left, Right, Center |
Left, Right, Center |
| Z - Stage Type |
Vertical |
Vertical |
Vertical |
Vertical |
| Stage Surface (mm) |
60 X 60 |
60 X 60 |
80 X 80 |
100 X 100 |
| Stroke (mm) |
± 6.5 |
± 6.5 |
± 12.5 |
± 12.5 |
| Resolution (mm) |
10um / division (0.01) |
10um / division (0.01) |
10um / division (0.01) |
10um / division (0.01) |
| Parallelism (mm) |
0.03 |
0.03 |
0.03 |
0.03 |
| Running Parallelism (mm) |
0.02 |
0.02 |
0.015 |
0.015 |
| Straightness (mm) |
0.008 |
0.008 |
0.005 |
0.005 |
| Travel Guide |
Crossed Roller Bearing |
Crossed Roller Bearing |
Crossed Roller Bearing |
Crossed Roller Bearing |
| Material |
Aluminum |
Aluminum |
Aluminum |
Aluminum |
| Load Capacity (kg/f) |
2 |
2 |
5 |
5.5 |
| Weight (kg) |
0.31 |
0.35 |
0.49 |
0.65 |
| Specification / Model |
S6V-12025L, R, C |
S6V-12050L, R, C |
| Micro head Position |
Left, Right, Center |
Left, Right, Center |
| Z - Stage Type |
Vertical |
Vertical |
| Stage Surface (mm) |
120 X 120 |
120 X 120 |
| Stroke (mm) |
± 12.5 |
± 25 |
| Resolution (mm) |
10um / division (0.01) |
10um / division (0.01) |
| Parallelism (mm) |
0.03 |
0.03 |
| Running Parallelism (mm) |
0.02 |
0.02 |
| Straightness (mm) |
0.01 |
0.01 |
| Travel Guide |
Crossed Roller Bearing |
Crossed Roller Bearing |
| Material |
Aluminum |
Aluminum |
| Load Capacity (kg/f) |
6.5 |
6.5 |
| Weight (kg) |
1.7 |
1.7 |
