[S2] SUS-Slim Stage XY-Stages

For the stainless steel stage material, if it is a thin integrated body and guide just like the steel stage, special steel of SUS440C material is used, but if not, and it is made of general SUS316 material, then the cross roller guide is applied. Unlike SUS440C, SUS316 types cannot be heat treated. Even if it is treated with heat, it can only be done by gas carburizing up to 0.1mm deep from the surface; however, in this case, only the surface gets strong, and the inside is not treated, thus the foundation of the material becomes weak. Stainless steel stages are usually used in environments that require high vacuum, high-grade clean rooms, or those that require chemicals. For post-treatment, electroless nickel can be applied to prevent oxidation of the surface.